Thin-film metrology supplier k-Space offers a variety of in-situ tools, among them kSA ICE. The name stands for Integrated Control for Epitaxy. This tool is specifically designed for process monitoring of Metalorganic Chemical Vapor Deposition (MOVCD).
It measures real-time temperature, thin-film thickness and reflectivity, bow and surface roughness during MOCVD deposition, which is a step in the manufacturing of High Brightness LEDs. kSA ICE has multiple applications in High Brightness LED manufacturing as well as in high power electronics manufacturing and in materials research and development.
It works for most types of materials used in MOCVD deposition. k-Space has worked closely with leading High Brightness LED manufacturers and MOCVD tool manufacturers to ensure kSA ICE is easy to integrate.