Semiconductor films are produced through the process of crystalline deposition. Measuring this deposition during production significantly reduces costs. The preferred method for this in-situ film characterization is Reflection High-Energy Electron Diffraction (RHEED).

power-of-RHEED

One of the industry-leading tools to perform RHEED surface analysis is the kSA 400, which combines a high-resolution, high-speed, and high-sensitivity CCD camera with sophisticated RHEED-specific acquisition and analysis software. By acquiring RHEED images along the major crystal directions of the surface and measuring the pixel spacing and calculating a ratio, the kSA 400 determines the surface crystal structure.

The kSA 400 has been developed by thin-film metrology manufacturer k-Space and is now available in its fifth generation. Three different software packages for a full range of RHEED acquisition and analysis are available for the kSA 400.